XDS10 真空泵

Displacement

          50 Hz operation

11.3 m³h^-1 / 6.7 ft³min^-1

          60 Hz operation

13.4 m3h^-1 / 7.9 ft³min^-1

Peak pumping speed

          50 Hz operation

9.3 m³h^-1 / 5.5 ft³min^-1

          60 Hz operation

11.1 m³h^-1 / 6.5 ft³min^-1

Ultimate vacuum (total pressure)

          50 Hz

7 x 10^-2 mbar / 5.3 x 10^-2 Torr

          60 Hz

6 x 10^-2 mbar / 4.5 x 10^-2 Torr

Inlet connection

NW25

Outlet connection

NW25

Maximum allowed outlet pressure

1.0 bar gauge

Maximum allowed inlet and gas ballast pressure

0.5 bar gauge

Maximum water vapor inlet pressure

35 mbar / 23 Torr

Maximum water vapor pumping rate

          Gas ballast low flow

70 g h^-1

          Gas ballast high flow

>200 g h^-1

Motor power

0.3 kW

Motor voltages

          1-phase 50 Hz

200-230 V or 380-415 V

          1-phase 60 Hz

200-230 V or 400-460 V

Operating temperature range

5 - 40 °C

Weight

24.5 kg (54 lb)

Noise

55 dB (A) @ 50 Hz

Vibration

<1.5 mms-1 (rms)

Leak tightness (static)

<10^-6 mbar I s^-1